NJIT Physics Department Seminar


Nov. 14th, Friday (**SPECIAL DAY**)


Enabling Blue LEDs using Metalorganic Chemical vapor Deposition (MOCVD)


Dr. Chris Ebert

R&D Laboratory Manager

Veeco, Somerset, NJ

(Device Physics, Host: Sirenko)


Time: 11:45am-12:45pm with 11:30am tea time

Room: ECE 202



Metal Organic Chemical Vapor Deposition (MOCVD) is a process technology used for the epitaxial deposition of a wide variety of compound semiconductors used in the microelectronics and optoelectronics industry. With the pioneering work of Drs. Nakamura, Akasaki and Amano, recently awarded the 2014 Nobel Prize in Physics, blue LEDs have revolutionized solid state lighting for consumer electronics and general lighting. Blue LEDs are composed of Gallium Nitride (GaN) and related materials epitaxial deposited in nanoscale dimensions on Sapphire substrates using MOCVD. The physics of MOCVD deposition is complex and requires understanding of principles of mass transport and growth kinetics at high growth temperatures along with a background in material science engineering. In this presentation, we will overview the LED market and device requirements for blue LEDs and present a detailed review of the MOCVD process of blue LEDs. Veeco is a major manufacturer of MOCVD reactors for the general lighting industry with its R&D center located in Somerset, NJ.