Denton DV 515
Denton DV 515 Physical Vapor Deposition Unit is used to complete required metallization for test device (Schottky Diode and MOS capacitor). It is designed to automatically evaporate from load to unload, and is furnished as the "Auto-Carb" for carbon evaporation or the "SEM" (for scanning electron microscope) for metallic evaporation. If desired, the unit may also be set up to do both carbon and metallic evaporation on 4", 5" and 6" wafers.
The Denton DVG-6 Cold Cathode Ionization Gauge provides reliable accurate pressure measurement in the most widely used high vacuum range from below 10-3
Torr. Full scale readings are provided for 10-4
Pressure is determined by ionizing the gases present using a high voltage current in a magnetic field. The ion current relates directly to the number of gas molecules, i.e. the gas pressure.
Some of the components of the Denton 515 are:
- Vacuum Tank: consists of 10" dia x 12" high Pyrex bell jar and gasket resting on stainless steel base plate assembly.
- Pumping System: Consists of a 31/4" air cooled, high speed diffusion pump, Welch 1405, 2 stage, gas ballasted mechanical pump and 3/4" vacuum solenoid valve.
- Vacuum Gauges: The vacuum gauge consists of a two (2) position Hastings thermocouple gauge with on-off switch, pilot light, and selector switch to read pressure down to 1 micron at the mechanical pump (position #1) or in the bell jar (position #2).
- Electrical Controls & Filament Supply: The front panel hinges forward for easy access. From it we can control every single operation of the Denton 515.