Microfabrication Hardware

Hardware image

Prof. Voronov has developed a low-cost DYI mask aligner for soft lithography of multilayered microfluidics devices. The advantage of this equipment is that fundamentally covers all the key features of a commercial mask aligner, while being low cost, light weight, and having low power consumption and high accuracy.

Selected Publications:

  1. Q. L. Pham, N. A. N. Tong, A. Mathew, S. Basuray, and R.S. Voronov.
    “A compact low-cost low-maintenance open architecture mask aligner for fabrication of multilayer microfluidics devices”
    2018. Biomicrofluidics 12, 044119.